Physical Vapor Deposition Technique for Growing Nanostructures

Sputter System

 • Our sputter system is a MagSput series product from Torr.International Inc.

 • It is a flexible planar magnetron sputtering system designed specifically for the R&D and prototype production.

 • The system can be used to deposit a wide variety of materials including aluminum, carbon, chromium, gold, Teflon, Silicon Dioxide, tantalum, tungsten, titanium and more.

Thermal

 • Thermal evaporation system is a homemade thermal evaporation system including 4 sources.

 • A 4 inch whole wafer can be put into the chamber for deposition.

 • Most metal materials can be deposited using this system.